Thin-film microelectronic devices
Тип: Нормативний
Кафедра: physical and biomedical electronics
Навчальний план
| Семестр | Кредити | Звітність |
| 9 | 4.5 | Іспит |
Лекції
| Семестр | К-сть годин | Лектор | Група(и) |
| 9 | 16 | доцент Penyukh B. R. | ФеMм-11, ФеMм-12 |
Лабораторні
| Семестр | К-сть годин | Група | Викладач(і) |
| 9 | 32 | ФеMм-11 | доцент Penyukh B. R., доцент Penyukh B. R. |
| ФеMм-12 | доцент Penyukh B. R., доцент Penyukh B. R. |
Опис навчальної дисципліни
Issues related to the methods of obtaining film samples are considered; physical phenomena that can significantly affect the parameters of micro- and nanoelectronics elements are analysed; methods of studying the properties of film materials and determining the operating parameters and characteristics of microelectronic devices are studied.
The aim of teaching the discipline is to develop students’ knowledge and practical skills in working with film sample preparation systems, special methods of controlling their physical parameters, and understanding the processes underlying the operation of film microelectronic devices of varying degrees of complexity.
Рекомендована література
- 1. W. Menz, J. Mohr, 0. Paul. Microsystem Technology / John Wiley & Sons, 2001, P.500.
- 2. C. Y. Chang, S. M. Sze. ULSI devices / John Wiley & Sons, 2000, P. 729.
- 3. Stephen A. Campbell. The Science and Engineering of Microelectronic Fabrication / Oxford University Press, 2001, P.603.
- 4. Richard C. Jaeger. Introduction to Microelectronic Fabrication. Second Edition. Volume V / Prentice Hall, 2002, P.318.
- 5. Owen Bishop. Microelectronics – Systems and Devices / Newnes, Oxford, 2000, P.213.
- 6. Adel S. Sedra, Kenneth C. Smith. Microelectronic Circuits. Fifth Edition / Oxford University Press, 2004, P. 1373.
- 7. B. R. Sankapal, A. Ennaoui, R. B. Gupta, Ch. D. Lokhande, Simple Chemical Methods for Thin Film Deposition. Synthesis and Applications. / Springer Nature Singapore Pte Ltd., 2023, Р. 582.