Studies > Thin-film microelectronic devices

Thin-film microelectronic devices

Type: Normative

Department: physical and biomedical electronics

Curriculum

SemesterCreditsReporting
94.5Exam

Lectures

SemesterAmount of hoursLecturerGroup(s)
916Associate Professor Penyukh  B. R.ФеMм-11, ФеMм-12

Laboratory works

SemesterAmount of hoursGroupTeacher(s)
932ФеMм-11Associate Professor Penyukh  B. R., Associate Professor Penyukh  B. R.
ФеMм-12Associate Professor Penyukh  B. R., Associate Professor Penyukh  B. R.

Опис навчальної дисципліни

Issues related to the methods of obtaining film samples are considered; physical phenomena that can significantly affect the parameters of micro- and nanoelectronics elements are analysed; methods of studying the properties of film materials and determining the operating parameters and characteristics of microelectronic devices are studied.

The aim of teaching the discipline is to develop students’ knowledge and practical skills in working with film sample preparation systems, special methods of controlling their physical parameters, and understanding the processes underlying the operation of film microelectronic devices of varying degrees of complexity.

Recommended Literature

  • 1. W. Menz, J. Mohr, 0. Paul. Microsystem Technology / John Wiley & Sons, 2001, P.500.
  • 2. C. Y. Chang, S. M. Sze. ULSI devices / John Wiley & Sons, 2000, P. 729.
  • 3. Stephen A. Campbell. The Science and Engineering of Microelectronic Fabrication / Oxford University Press, 2001, P.603.
  • 4. Richard C. Jaeger. Introduction to Microelectronic Fabrication. Second Edition. Volume V / Prentice Hall, 2002, P.318.
  • 5. Owen Bishop. Microelectronics – Systems and Devices / Newnes, Oxford, 2000, P.213.
  • 6. Adel S. Sedra, Kenneth C. Smith. Microelectronic Circuits. Fifth Edition / Oxford University Press, 2004, P. 1373.
  • 7. B. R. Sankapal, A. Ennaoui, R. B. Gupta, Ch. D. Lokhande, Simple Chemical Methods for Thin Film Deposition. Synthesis and Applications. / Springer Nature Singapore Pte Ltd., 2023, Р. 582.

Силабус:

Завантажити силабус